3/4/10	8:25:14 PM	Program started normally
3/4/10	8:25:15 PM	Helium valve closed
3/4/10	8:25:15 PM	H2 valve closed
3/4/10	8:25:15 PM	BCl3 valve closed
3/4/10	8:25:15 PM	PH3 valve closed
3/4/10	8:25:15 PM	SiCl4 pre valve closed
3/4/10	8:25:15 PM	SiCl4 post valve closed
3/4/10	8:25:15 PM	Main Vac valve closed
3/4/10	8:25:15 PM	Bypass valve closed
3/4/10	8:25:15 PM	Bubbler valve closed
3/4/10	8:25:15 PM	Helium MFC set to  0.000000
3/4/10	8:25:15 PM	H2 MFC set to  0.000000
3/4/10	8:25:15 PM	BCl3 MFC set to  0.000000
3/4/10	8:25:15 PM	SiCl4 MFC set to  0.000000
3/4/10	8:25:15 PM	Bypass solenoid MFC set to  760.000000
3/4/10	8:25:15 PM	Tube furnace set to 0
3/4/10	8:25:23 PM	Program exited cleanly
